A probe is a commonly used measuring device for machine tools, and its precision determines the quality of the workpiece. The touch probe has the advantage of being small in size and easy to repair, low in price due to its simple structure. In addition, since it has benefits such as accuracy, precision, flexibility, etc. it is widely used in various industrial fields(3D scanning, reverse design, positioning, etc.). However, the contact-type touch probe has structural limitations in generating an arc by contact between the shaft contact point and the circular contact point. These arcs create carbides and form insulating films to interfere with the contact/short circuit of the probe. In addition, a precision error occurs when repeated measurements are made. Since the touch probe repetition error is an essential factor affecting the workpiece's quality and reliability, various research and development of contact materials that can reduce arc generation to improve the precision of the cutting tool origin selection touch probe are necessary to produce more precision. In this study, repeated arc generation and carbide generation experiments were conducted on three types of touch probe contact materials (AgNi10, Ag30W70, and WC94Co6) to select a touch probe contact material with an original repetition precision of 0.5 ㎛<2-sigma, Range of 3.12 ㎛. As a result of the measurement, it was found that the contact material WC94Co6 was suitable as a contact material. These results will greatly help improve the quality and reliability of various touch-probe contact material optimization studies and processed products.