Contents 1
Study on the circuit performance of various interconnect metal materials in the latest process nodes / Moonjeong Choi ; Juhwan Park ; Seoungyeol Choi ; Kyungbae Kwon ; Yeji Lee ; Wonyeong Jang ; Jongwook Jeon 1
Abstract 1
Ⅰ. INTRODUCTION 1
Ⅱ. PATH-FINDING PROCESS-DESIGN-KIT (PDK) SETUP AND LOGIC INTEGRATED CIRCUIT ANALYSIS RESULTS 3
1. Path-finding PDK : FEOL Model 3
2. Path-finding PDK : MOL, BEOL Model 4
3. Logic Integrated Circuit Analysis with Various Wire Metal Options 6
Ⅲ. CONCLUSIONS 10
REFERENCES 11
[저자소개] 12