Foreword to the Second EditionPreface to the Second EditionList of ContributorsList of Acronyms and Abbreviations1 EUV Lithography: An Historical Perspective2 The EUV LLC: An Historical Perspective3A EUV Sources for High-Volume Manufacturing3B EUV Sources for High-Volume Manufacturing4A The EQ-10 Electrodeless Z-PinchTM Metrology Source5 Optical Systems for EUVL6A Optics Contamination6B Collector Contamination: Normal-Incidence (Multilayer) Collectors7 EUV Mask and EUV Mask Metrology8 Photoresists for EUV Lithography9 Fundamentals of EUVL Scanners10 EUVL System Patterning PerformanceAppendix: Reference Data for the EUV Spectral RegionIndex