본문 바로가기 주메뉴 바로가기
22대 대한민국 국회 국회정보길라잡이 국회의원검색
회원가입 로그인
HOME

정보검색

소장정보 검색

국회도서관 홈으로 정보검색 소장정보 검색
결과 내 검색 동의어 포함
결과 내 검색 동의어 포함

-

초록보기



A focusing grating coupler (FGC) was not fabricated by the ‘Continuous Path Control’ writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 ?0.5 mm2 area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

권호기사

권호기사 목록 테이블로 기사명, 저자명, 페이지, 원문, 기사목차 순으로 되어있습니다.
기사명 저자명 페이지 원문 목차
p-n Heterojunction Composed of n-ZnO/p-Zn-doped InP Eun Sub Shim 外著 pp.1-3

Fabrication of Field-Emitter Arrays using the Mold Method for FED Applications Kyung-Jea Cho 外著 pp.4-8

Electrical Properties of Organic/Inorganic Hybrid Composites for Insulation Materials Sangcheol Kim 外著 pp.9-13

Effects of Deposition Temperature and Annealing Process on PZT Thin Films Prepared by Pulsed Laser Deposition Min-Chul Kim 外著 pp.14-17

Properties of Indium Tin Oxide Transparent Conductive Thin Films at Various Substrate and Annealing Temperature Woon-Jo Jeong 外著 pp.18-22

The Electronic Structure of Carbon Nanotubes with Finite Length :Tight Binding Theory Won-Ha Moon ;Won-Woo Kim ;Ho-Jung Hwang pp.23-29

Fabrication Technology of the Focusing Grating Coupler using Single-step Electron Beam Lithography Tae-Youb Kim 外著 pp.30-37

Current-Voltage-Luminance Characteristics Depending on a Direction of Applied Voltage in Organic Light-Emitting Diodes Sang Keol Kim ;Jin Woong Hong ;Tae Wan Kim pp.38-41

Effect of Dry Process on Dielectric Properties of PZT Thin Films Prepared by Sol-Gel Process Min-Ho Bae 外著 pp.42-45

참고문헌 (18건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 Nanofabrication of solid- state Fresnel lenses for electron optics 네이버 미소장
2 Waveguide holograms: A new approach to hologram integration 네이버 미소장
3 Waveguide grating lenses for optical couplers. 네이버 미소장
4 Focusing grating coupler design method using holographic optical elements. 네이버 미소장
5 Efficient coupling into polymer waveguides by gratings 네이버 미소장
6 Physical optics analysis of the focusing grating coupler. 네이버 미소장
7 Modeling of a focusing grating coupler using vector scattering theory. 네이버 미소장
8 Mirrorless Lasing from Mesostructured Waveguides Patterned by Soft Lithography 네이버 미소장
9 Physical approximants to electron scattering 미소장
10 Dose contribution of heating in electron-beam lithography 네이버 미소장
11 Optimizing electron beam lithography writing strategy subject to electron optical, pattern, and resist constraints 네이버 미소장
12 Charging and discharging of electron beam resist films 네이버 미소장
13 Fabrication of grating patterns by e-beam lithography 네이버 미소장
14 Fabrication of submicrometre parallelogramic-shaped gratings in SiO2 네이버 미소장
15 Efficient focusing polymer waveguide grating couplers 네이버 미소장
16 Aberration characterizations of a focusing grating coupler in an integrated-optic disk pickup device. 네이버 미소장
17 Integrated-optic implementation of a confocal scanning optical microscope 네이버 미소장
18 Integrated optical-disk pickup that uses a focusing grating coupler with a high numerical aperture. 네이버 미소장

추천서가 (다양한 추천 자료를 만나보세요)

권호기사보기

권호기사 목록 테이블로 기사명, 저자명, 페이지, 원문, 기사목차 순으로 되어있습니다.
기사명 저자명 페이지 원문 기사목차