1 |
Evaluation method on destruction and removal efficiency of perfluorocompounds from semiconductor and display manufacturing
|
소장 |
2 |
Park, Y. K., “Waste Gas Treatment System for Semiconductor Process,” Environment Technology Development Business, Report the Ministry of Environment (2004). |
미소장 |
3 |
Greenhouse Gas Inventory and Research Center, “ National Greenhouse Gas Inventory Report of Korea,” (2014). |
미소장 |
4 |
Chung, J. K., Lee, K. Y., and Kim, D. H. “Device for Purifying Exhausted Gas from Chemical Vapor Deposition,”Korea Patent No. 10-1617691 (2016). |
미소장 |
5 |
Large scale treatment of perfluorocompounds using a thermal plasma scrubber
|
소장 |
6 |
A Study on Catalytic Process in Pilot Plant for Abatement of PFC Emission
|
소장 |
7 |
Jeong, S. H., Han, J. H., Lee, S. J., and Lee, M. J., “Studies for Discomposing Characteristic of PFCs Fluid with the Plasma Torch,” 30th KOSCO Symposium, 141-146 (2008). |
미소장 |
8 |
A Study on Decomposition and By-products of PFCs using Electron-beam
|
소장 |
9 |
An experimental study of N2 dilution effects on CH4–O2 flame stabilization characteristics in a two-section porous medium  |
미소장 |
10 |
Qin, L., Han, J., Wang, G., Kim, H. J., and Kawaguchi, I., “Highly Efficient Decomposition of CF4 Gases by Combustion,”Science Research, Conference on Environmental Pollution and Public Health, 126-130 (2010). |
미소장 |
11 |
Chung, J. K., “Process Equipment Emission Control Technology,”3th Forums on Cleanroom Contamination Control for Next Generation, Korea Air Cleaning Association (2016). |
미소장 |
12 |
National Institute of Environmental Research, “Guideline for Measurement Method of Destruction and Removal Efficiency of Greenhouse Gas Abatement System Using at Semiconductor and Display Manufacturing,” (2015). |
미소장 |
13 |
Lee, D. K., Kim, S. G., Noh, D. S., Ko, C. B., and Guahk, Y. T., “Energy-saving Combustion Apparatus for Incineration Disposal of Non-degradable Noxious Gases, and Operation Method Thereof,” PCT/KR2015/002964 (2015). |
미소장 |