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Y123 films have been deposited on LaAlO3 (100) single-crystal and IBAD substrates by spray pyrolysis method using
nitrate precursors. Ultrasonic atomization was adopted to decrease the droplet size, spraying angle and its moving velocity
toward substrate for introducing the preheating tube furnace in appropriate location. A small preheating tube furnace was
installed between spraying nozzle and substrate for fast drying and enhanced decomposition of precursors. C-axis oriented
films were obtained on both LAO and IBAD substrates at deposition temperature of around 710~750℃ and working
pressures of 10~15 torr. Thick c-axis epitaxial film with the thickness of 0.3~0.6 ㎛ was obtained on LAO single-crystal by
10 min deposition. But the XRD results of the film deposited on IBAD template at same deposition condition showed that the
buffer layers of the IBAD metal substrate was affected by long residence of metal substrate at high temperature for YBCO
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