표제지
Abstract
요약
목차
기호 설명 10
제1장 서론 11
제2장 이론적 배경 13
2.1. 진동이란 13
2.2. 1자유도 시스템의 진동 15
2.3. 다자유도 시스템의 진동 16
2.4. 진동의 발생 21
2.4.1. 회전 불균형 21
2.5. 확대계수 22
2.6. 공진(Resonance) 23
제3장 장비 동특성 분석 25
3.1. Polishing Machine 구조 25
3.2. 컴퓨터 시뮬레이션 모델링 27
3.3. 컴퓨터 시뮬레이션을 통한 유한요소해석 28
제4장 설계 개선안 도출 30
4.1. 개선방향 검토 30
4.2. 설계 개선안 #1 30
4.3. 설계 개선안 #2 33
4.4. 설계 개선안 #3 35
제5장 결론 37
참고문헌 39
[Table 3.1] Speed of motors 25
[Table 4.1] Natural frequency increase of alteration #1 32
[Table 4.2] Magnitudes of vibration of the Original and Alteration #1 32
[Table 4.3] Natural frequency increase of alteration #2 34
[Table 4.4] Magnitudes of vibration of the Original and Alteration #2 34
[Table 4.5] Natural frequency increase of alteration #3 36
[Table 4.6] Magnitudes of vibration of the Alteration #1 and Alteration #3 36
[Table 4.7] Magnitudes of vibration of the Oroginal and Alteration #3 37
[Fig 1.1] Manufacturing process step of sapphire wafer 12
[Fig 2.1] One degree of freedom system 15
[Fig 2.2] Two degree of freedom system 16
[Fig 2.3] Two degree of freedom system undamped free vibration 17
[Fig 2.4] Mode shapes of vibrations 20
[Fig 2.5] A dynamic system with rotating unbalance 21
[Fig 2.6] Magnification factor 23
[Fig 2.7] Vibration amplitude of according to the operating speed 24
[Fig 3.1] Shape of polishing machine 26
[Fig 3.2] Modeling of polishing machine 27
[Fig 3.3] Natural frequencies and... 28
[Fig 3.4] Natural frequencies and... 29
[Fig 4.1] Shape of alteration #1 31
[Fig 4.2] Shape of alteration #2 33
[Fig 4.3] Shape of alteration #3 35
[Fig 5.1] Graph of magnitude of vibration... 38
Formula (2-1) (제목없음) 14
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