표제지
요약
Abstract
목차
제1장 서론 14
제2장 이론적 배경 16
2.1. 탄화규소 개요 16
2.2. 탄화규소 결정구조 17
2.3. 반응 소결 탄화규소 18
2.4. 반응 소결의 반응 기구 20
2.5. 탄화규소 반사경 22
제3장 실험방법 24
3.1. 탄소 프리폼 제조 25
3.1.1. 탄소 출발 원료 배치 25
3.1.2. 탄소 프리폼 성형 제조 26
3.2. 반응 소결 27
3.2.1. 고온 진공 소결 장비 27
3.2.2. 반응 소결 공정 28
3.3. 특성 평가 29
3.3.1. 밀도와 기공률 29
3.3.2. 미세구조 29
3.3.3. X-선 회절 분석 30
3.3.4. 비커스 경도 30
제4장 결과 및 고찰 32
4.1. 반응 소결체의 외관 32
4.2. 반응 소결체의 XRD 36
4.3. 반응 소결체의 밀도 및 기공률 42
4.4. 반응 소결체의 미세구조 45
4.5. 반응 소결체의 경도 53
제5장 결론 56
참고문헌 57
Table 2-1. Properties of Mirror Substrate Material 22
Table 3-1. Batch Compositions for Carbon Preform with Different Amount... 25
Fig. 1-1. SiC mirror optical face and rear face (Boostec® SiC material). 15
Fig. 2-1. Schematic representation of for most common SiC polytypes... 18
Fig. 2-2. Process schematic for reaction bonded silicon carbide. 19
Fig. 2-3. Contrast of wetting behavior for a liquid on a horizontal plane. 21
Fig. 2-4. Silicon droplet on vitreous carbon at 1,500℃: (a) contact angle... 21
Fig. 3-1. Flowchart of experimental procedure for reaction bonded SiC. 24
Fig. 3-2. Carbon preforms with 0.5 wt% addition of Y₂O₃.. 26
Fig. 3-3. Configuration (a) and typical sample assembly (b) of high-... 27
Fig. 3-4. Schematic diagram of reaction bonded silicon carbide process. 28
Fig. 3-5. Photography of bench top lapping/polishing machine. 30
Fig. 3-6. Indentation geometry of Vicker's hardness. 31
Fig. 4-1. Exterior photos of the reaction bonded SiC specimen at 1,450℃... 33
Fig. 4-2. Lower side photos of the reaction bonded SiC specimen at 1,450... 34
Fig. 4-3. Lower side photos of the reaction bonded SiC specimen at 1,450... 35
Fig. 4-4. XRD patterns for reaction bonded SiC with different holding time... 36
Fig. 4-5. XRD patterns for reaction bonded SiC at 1,450℃ from the carbon... 38
Fig. 4-6. XRD patterns for reaction bonded SiC at 1,500℃ from the carbon... 39
Fig. 4-7. Relative content of SiC and Si of the reaction bonded SiC from... 41
Fig. 4-8. Relative content of SiC and Si of the reaction bonded SiC... 41
Fig. 4-9. Density and apparent porosity variation with holding time at... 42
Fig. 4-10. Density (a) and apparent porosity (b) variations with reaction... 44
Fig. 4-11. Optical microstructures for reaction bonded SiC produced at... 45
Fig. 4-12. SEM microstructures for reaction bonded SiC with different... 47
Fig. 4-13. SEM microstructures for reaction bonded SiC at 1,450℃ from... 48
Fig. 4-14. SEM microstructures for reaction bonded SiC at 1,500℃ from... 49
Fig. 4-15. SEM microstructures for reaction bonded SiC at 1,550℃ from... 51
Fig. 4-16. BSE SEM image and EDS mapping for reaction bonded SiC at... 52
Fig. 4-17. Vicker's hardness for reaction bonded SiC with different holding... 53
Fig. 4-18. Vicker's hardness variation with reaction temperature of the... 54
수식 2.1. [제목없음] 20
수식 3.1. [제목없음] 29
수식 3.2. [제목없음] 29
수식 3.3. [제목없음] 31
수식 3.4. [제목없음] 31