Title Page
Contents
ABSTRACT 9
Chapter 1. Introduction 10
1.1. Atomic Layer Deposition (ALD) 10
1.2. SiO₂ ALD 12
1.3. Catalyzed SiO₂ ALD 13
Chapter 2. Experimental Methods 16
2.1. Deposition materials and process details 16
2.2. Analysis Methods 18
2.2.1. In-situ FTIR 18
2.2.2. In-situ QCM 22
Chapter 3. Results and discussion 23
3.1. Catalysis mechanism of SiO₂ ALD 23
3.1.1. In-situ FTIR with roughing valve closed 23
3.1.2. In-situ FTIR with roughing valve open 28
3.2. Deposition characteristics with and without catalyst 34
3.3. The effect of ALD temperatures 40
Chapter 4. Conclusion 44
References 45
Abstract (in Korean) 51
Table 1. Temperature Conditions of In-situ Experimental Setup 17
Table 2. Experimental Conditions for In-situ FTIR Analysis (Closed Roughing Valve) 20
Table 3. Experimental Conditions for In-situ FTIR Analysis (Open Roughing Valve) 21
Figure 1. Schematic representation of one ALD reaction cycle. 11
Figure 2. Mechanism of pyridine catalysis in SiO₂ ALD from SiCl₄ and H₂O proposed by Klaus et al. in Ref. 31. (a) SiCl₄ half-reaction, (b) H₂O half-reaction. 15
Figure 3. Difference FTIR spectra in a series of sequential exposure of a bare silica pellet to HCDS/pyridine and H₂O/pyridine. 26
Figure 4. Difference FTIR spectra in a series of sequential exposure of a ten ALD-cycled silica pellet to HCDS/pyridine and H₂O/pyridine. The pyridine-... 27
Figure 5. Difference FTIR spectra in a series of sequential exposure of a bare silica pellet to HCDS/pyridine and H₂O/pyridine. The pyridine-catalyzed ALD... 30
Figure 6. Structures of Silanol Groups on Silica 31
Figure 7. Plausible mechanism of pyridine-catalyzed ALD of SiO₂ in 2nd half-reaction (a), (b) H₂O half-reaction, (c), (d) ethylene glycol half-reaction.[이미지참조] 32
Figure 8. Difference FTIR spectra in a series of sequential exposure of a bare silica pellet to HCDS/pyridine and EG/pyridine. The pyridine-catalyzed ALD of... 33
Figure 9. Mass gain changes as a function of time according to whether each half-reaction was catalyzed or not. The QCM measurement (red line) for non-... 36
Figure 10. Average mass gain changes as a function of purge time. SiO₂ ALD catalyzed in both half-reactions (a), catalyzed in the first half-reaction (b), and... 37
Figure 11. Difference FTIR spectra obtained during the 2nd to 4th cycles of SiO₂ ALD: (a) catalyzed in both half-reactions, (b) catalyzed in the second half-...[이미지참조] 38
Figure 12. Comparison of growth behavior in SiO₂ ALD with and without pyridine catalyst in each half-reaction. (a) Mass gain per cycle measured by... 39
Figure 13. Temperature dependence of pyridine-catalyzed ALD of SiO₂ in both half-reactions. (a) Difference spectra of the fourth cycle at each ALD... 42
Figure 14. Temperature dependence of Et₃N-catalyzed ALD of SiO₂ in both half-reactions. (a) Difference spectra of the fourth cycle at each ALD... 43