Contents
An intelligent system for semiconductor yield classification with soft computing techniques / 이장희 ; 하성호 1
I. Introduction 1
II. Related works 2
III. Intelligent yield prediction system (IYPS) 3
3.1. Case Pattern Classification (CPC) function 4
3.2. Yield Prediction (YP) function 6
3.3. User Assistant (UA) function 8
IV. Verification of the intelligent yield prediction system 8
4.1. Yield prediction by the CPC and YP 9
4.2. Discussion about prediction accuracy 9
V. Conclusion 10
References 11
[저자소개] 13
〈Abstract〉 15