Contents
Holographic measurement system for macro- and micro-objects nanoscale displacement detection / Timofey A. Efimov ; Mariya A. Asalhanova ; Yuri N. Kulchin ; Roman V. Romashko 1
Abstract 1
INTRODUCTION 1
MEASUREMENT SYSTEM 1
SENSITIVITY OF THE SYSTEM 2
MEASURING NANOSCALE DISPLACEMENTS 2
CONCLUSION 3
REFERENCES 3