This study was carried out with solution temperature variables of 75 ℃ and 90 ℃ for STS 304, which is a nuclear equipment material, in order to determine the corrosion damage behavior in chemical decontamination process using permanganic acid and oxalic acid. Then electrochemical polarization experiment, weight loss measurement, surface morphology observation and surface damage depth were measured every cycle of the decontamination process to analyze the degree of corrosion damage. As a result, the corrosion current density, weight loss, and surface damage increased as the decontamination process cycle increased, and the corrosion damage of STS 304 tended to increase. Few μm pitting damage was observed on the surface observation. In 5 cycle, the elongated wormhole-type pitting damage appeared, leading to relatively large surface damage. However, there was no significant difference in the degree of surface damage resulting from the increase in the temperature of the chemical decontamination solution.