Contents
Piezoelectric ultrasound MEMS transducers for fingerprint recognition / Soo Young Jung ; Jin Soo Park ; Min-Seok Kim ; Ho Won Jang ; Byung Chul Lee ; Seung-Hyub Baek 1
Abstract 1
1. INTRODUCTION 1
2. PIEZOELECTRIC MATERIALS FOR pMUT 2
2.1. PZT 2
2.2. AlN 2
2.3. PVDF 2
3. pMUT DEVICES 3
3.1. MEMS Fabrication Process 3
3.2. Array Structure of Ultrasound Cells 3
3.3. Geometry of Ultrasound Cells 4
3.4. Fingerprint Imaging by pMUT 4
4. CONCLUSIONS 5
REFERENCES 6