Contents
Improved responsivity of an a-Si-based micro-bolometer focal plane array with a SiNx membrane layer / Joontaek Jung ; Minsik Kim ; Chae-Hwan Kim ; Tae Hyun Kim ; Sang Hyun Park ; Kwanghee Kim ; Hui Jae Cho ; Youngju Kim ; Hee Yeoun Kim ; Jae Sub Oh 1
Abstract 1
1. INTRODUCTION 1
2. DESIGN OF MICROBOLOMETER 2
3. FABRICATION OF MICROBOLOMETER 2
4. CHARACTERIZATION OF MICROBOLOMETER 3
5. CONCLUSIONS 4
REFERENCES 4