Contents 1
In situ sensing of copper-plating thickness using OPD-regulated optical fourier-domain reflectometry / Nayoung Kim ; Do Won Kim ; Nam Su Park ; Gyeong Hun Kim ; Yang Do Kim ; Chang-Seok Kim 1
[요약] 1
Ⅰ. INTRODUCTION 1
Ⅱ. PRINCIPLE OF OPD-REGULATED OFDR 3
2.1. Experimental Setup 3
2.2. Results of OPD-regulated OFDR 4
Ⅲ. IN-SITU SENSING OF PHASE-BASED DISTANCE FOR COPPER PLATING 5
3.1. Experimental Setup 5
3.2. Experimental Results for Phase-based Distance 6
3.3. Experimental Results for Uniformized Copper-plating Thickness 7
Ⅳ. CONCLUSION 8
REFERENCES 8