Contents 1
Development of a MEMS-based H₂S sensor with a high detection performance and fast response time / Dong Geon Jung ; Junyeop Lee ; Dong Hyuk Jung ; Won Oh Lee ; Byeong Seo Park ; Daewoong Jung 1
Abstract 1
1. INTRODUCTION 1
2. DESIGN AND FABRICATION 2
3. RESULTS AND DISCUSSIONS 2
4. CONCLUSIONS 5
REFERENCES 5