Title page
Contents
Executive Summary 2
Introduction 5
Background on Lithography and EUV 5
The Development of EUV 8
EUV Origins 10
Fundamental Research and Technology Demonstration (1981-1992) 11
Applied Research and Technology Development (1993-1997) 12
Consortia and Industry-Led Technology Maturation (1997-2009) 13
Collaboration: Consortium Formation and the Global Research Agenda 13
Competition: Emerging EUV Leadership 16
Commercialization and High-Volume Manufacturing (2010-Present) 20
The EUV Research Community: Characterizing Signals of Emergence 22
Research Community Composition and Participation 22
Research Community Publications and Technical Areas of Focus 23
Identifying, Protecting, and Promoting the Next Emerging Technology 25
Identifying the Next Emerging Technology 25
Protecting and Promoting the Next Emerging Technology 27
Promoting Emerging Technology 28
Protecting Emerging Technology 29
Conclusion 31
Author 32
Acknowledgments 32
Appendix 1. Emerging Technology Attributes 33
Appendix 2. Next-Generation Lithography and Light Sources 34
Appendix 3. Comparing EUV Publication Intensity between SPIE and Scopus/Web of Science, 1994-2017 37
Endnotes 38
Table 1. Summary of Notable EUV Subcomponents and Suppliers 8
Table 2. Signals of Emerging Technology Coherence, Growth, Impact, and Novelty 26
Table 3. Next-Generation Lithography Approaches and Challenges 35
Table 4. Generations of Lithography Light Sources 36
Figure 1. The Photolithography Process 5
Figure 2. A Cross-Section Representation of an EUV Machine 7
Figure 3. Timeline of EUV Development and Notable Actors 10
Figure 4. EUV LLC Structure 15
Figure 5. Number of EUV-Affiliated Publications Annually, 1981-2017 23
Figure 6. Policy Instruments and Enabling Levers 28
Figure 7. Visible Light Spectrum 36