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Title Page

Abstract

Contents

I. INTRODUCTION 13

II. EXPERIMENTAL 19

2.1. Deposition method 19

2.1.1. Substrate 19

2.1.2. Deposition system 19

2.1.3. Deposition process 20

2.2. Interfacial Contact Resistance 20

2.3. Electrochemical Test 21

2.3.1. Equipment and test condition 21

2.3.2. Polarization test 22

2.3.3. EIS 22

2.4. Materials Characterization 23

III. RESULTS AND DISCUSSION 27

3.1. Interfacial Contact Resistance 27

3.1.1. ICR of metallic bipolar plate 27

3.1.2. ICR of carbon coated bipolar plate 29

3.2. Single Layer Carbon Coating 38

3.2.1. Film characterization 39

3.2.2. Corrosion properties 41

3.2.3. Potentiostatic test 43

3.2.4. Impedance analysis of carbon coatings 45

3.2.5. Limitations 50

3.3. Interlayer Effect on Carbon Coating 65

3.3.1. Residual stress and adhesion 65

3.3.2. Nature of titanium interlayer 71

3.3.3. Corrosion property of bilayer coating 76

3.3.4. Suggestions for future work 78

IV. CONCLUSION 95

V. REFERENCES 98

국문초록 110

List of Tables

Table 2-1. Typical deposition parameters. 24

Table 3-1. Total charge densities and ion concentrations for bare... 51

Table 3-2. Possible causes of CPE. 51

Table 3-3. EIS fitting parameters. 52

List of Figures

Figure 1-1. A schematic diagram of PEMFC. 18

Figure 2-1. A schematic diagram of the deposition chamber. 25

Figure 2-2. A schematic diagram of the ICR measurement with a... 26

Figure 3-1-1. Potential-pH (Pourbaix) diagrams for the Fe... 32

Figure 3-1-2. XPS spectra of Fe (a) and Cr (b). 33

Figure 3-1-3. Current density transient curve in a log-log scale... 34

Figure 3-1-4. ICR values of various bipolar plates before and after... 35

Figure 3-1-5. ICR values of carbon films at various substrate... 36

Figure 3-1-6. Scaled illustration about the effect of the surface... 37

Figure 3-2-1. Potential-pH diagram of the system C-O-H. 53

Figure 3-2-2. Ternary phase diagram of bonding in amorphous... 54

Figure 3-2-3. Cross-sectional TEM of carbon films deposited with... 55

Figure 3-2-4. Raman spectra at different substrate bias voltages... 56

Figure 3-2-5. Potentiodynamic polarization curves of bare STS... 57

Figure 3-2-6. Conceptual simulation for potentiodynamic... 58

Figure 3-2-7. FIB inspection of localized corrosion crater after the... 59

Figure 3-2-8. Potentiostatic polarization curves of the bare STS... 60

Figure 3-2-9. Circuit model of STS 316L (upper) and carbon... 61

Figure 3-2-10. EIS results of carbon coated STS 316L before and... 62

Figure 3-2-11. Buckling images of carbon coating after corrosion... 63

Figure 3-2-12. Summarized corrosion mechanism of inert coating... 64

Figure 3-3-1. Davis model of stress development mechanism. 80

Figure 3-3-2. Deconvolution example of Raman spectrum with 4... 81

Figure 3-3-3. FE-SEM images of sample A around scratch track. 82

Figure 3-3-4. Nano-scratch track of carbon film. 83

Figure 3-3-5. Deposition rate of titanium film vs. target power (a),... 84

Figure 3-3-6. Titanium coated on STS 316L (a-b), and on Si... 85

Figure 3-3-7. Potentiodynamic polarization of titanium coated STS... 86

Figure 3-3-8. FE-SEM images of titanium deposited with target... 87

Figure 3-3-9. Cyclic voltammograms of bare and titanium coated... 88

Figure 3-3-10. FE-SEM images of CTi100-100 around scratch... 89

Figure 3-3-11. Current density of C/Ti bilayer coating at 0.6 VSCE...(이미지참조) 90

Figure 3-3-12. FIB inspection of C/Ti bilayer coated STS 316L. 91

Figure 3-3-13. XPS depth profile of CTi400-100 before (a) and... 92

Figure 3-3-14. CV plot of single carbon coating (a), and C-Ti... 93

Figure 3-3-15. FE-SEM images of various samples after... 94

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