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Recently, several micro electro-mechanical systems (MEMS) such as a MEMS gyroscope have been developed by using micro manufacturing

technologies. Micro scale products, however, usually have a relatively large manufacturing uncertainty compared to normal

macro scale products. It is quite expensive to lower the variance of material properties as well as the geometric properties of a micro scale

product. The material and geometric uncertainties caused by a micro manufacturing process inevitably lead to the uncertainty of the

product performance. Therefore, to achieve a reliable design of a product, the performance uncertainty of the product, which is often

expressed by the variance or the standard deviation, needs to be estimated in a reliable way. In this paper, the equations of motion of a

MEMS gyroscope model are derived to analyze the system performance indices (sensitivity and bandwidth). The mean values of the

design variables are determined from the requirements of product size, maximum vibration amplitude, and driving frequency. Then the

standard deviation of some critical design variables is determined from the performance requirements. Finally, a statistical analysis procedure

based on sample statistics is proposed to estimate the confidence interval of the performance index statistics.

권호기사

권호기사 목록 테이블로 기사명, 저자명, 페이지, 원문, 기사목차 순으로 되어있습니다.
기사명 저자명 페이지 원문 목차
Seven-bar mechanical press with hybrid-driven mechanism for deep drawing ,part1 :Kinematics analysis and optimum design Hui Li ;Yuping Zhang pp.2153-2160

Seven-bar mechanical press with hybrid-driven mechanism for deep drawing ,part2 :Dynamic modeling and simulation Hui Li ;Yuping Zhang pp.2161-2167

Theoretical and experimental investigation of the effects of an irregular-pitch cutter on vibration in face-milling Hui Li ;Haiqi Zheng ;Liwei Tang pp.2169-2174

Design of a vibrating MEMS gyroscope considering design variable uncertainties Yong Woo Kim ;Hong Hee Yoo pp.2175-2180

Dynamic analysis of a train-bridge system under multi-support seismic excitations Nan Zhang ;He Xia ;Guido De Roeck pp.2181-2188

Numerical analysis method to estimate thermal deformation of a ventilated disc for automotives Won Sun Chung ;Sung Pil Jung ;Tae Won Park pp.2189-2195

(A)performance study on a direct drive hydro turbine for wave energy converter Young-Do Choi ;Chang-Goo Kim ;You-Taek Kim ;Jung-Il Song ;Young-Ho Lee pp.2197-2206

(A)numerical study on electrohydrodynamic induction pumps using CFD modeling Byoung Seo Lee ;Joon Sik Lee pp.2207-2214

Numerical study on spatial distribution of silver nanoparticles inside whole-body type inhalation toxicity chamber Jae Ho Cho ;Atul Kulkarni ;Hojoong Kim ;Jin Uk Yoon ;Jae Hyuck Sung ;Il Je Yu ;Taesung Kim pp.2215-2220

Creep modeling in functionally graded rotating disc of variable thickness D. Deepak ;V. K. Gupta ;A. K. Dham pp.2221-2232

(An)inscribed surface model for the elastic properties of armchair carbon nanotube Sheng Lu ;Chongdu Cho ;Kyu-won (Ken) Choi ;Wonjun Choi ;Sangkyo Lee ;Na Wang pp.2233-2239

Variable thermal loading analysis on (111) plane of single crystal gold Murugavel Rathinam pp.2241-2245

(A)mixed analytical-numerical investigation of snap-through of low arches with a power-law variable thickness Ali Asghar Atai ;Mohammad Hassan Naei ;Reza Eghtefari pp.2247-2252

Analysis of pulsed Nd:YAG laser welding of AISI 304 steel Kwanwoo Kim ;Jungkil Lee ;Haeyong Cho pp.2253-2259

Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials Xiang Cheng ;Zhigang Wang ;Kazuo Nakamoto ;Kazuo Yamazaki pp.2261-2268

Analysis of five- and six-machine micro-factory layouts for micro-pump productivity improvement Murali Subramaniyam ;Sangho Park ;Jong Kweon Park pp.2269-2273

Complexity of cellular manufacturing systems based on entropy models Zhifeng Zhang pp.2275-2280

(A)study of the control of the blank holding force using an MR damper in a drawing press Young-Won Yun ;Hyung-Sub Bae ;Myeong-Kwan Park pp.2281-2288

Analytical model for predicting the surface profile of a work piece in round-to-2-R and square-to-2-R oval groove rolling U. K. Yoo ;J. B. Lee ;J. H. Park ;Y. Lee pp.2289-2295

(A)study on the efficiency improvement of a passive oil damper using an MR accumulator Young-Won Yun ;Seong-Min Lee ;Myeoung-Kwan Park pp.2297-2305

Design of safety mechanism for an industrial manipulator based on passive compliance Hwi-Su Kim ;Jung-Jun Park ;Jae-Bok Song ;Jin-Ho Kyung pp.2307-2313

Compliant actuation of parallel-type variable stiffness actuator based on antagonistic actuation Ki-Hoon Nam ;Byeong-Sang Kim ;Jae-Bok Song pp.2315-2321

Modeling and fuzzy control of the engine coolant conditioning system in an IC engine test bed Seyed Saeid Mohtasebi ;Farzad A. Shirazi ;Ahmad Javaheri ;Ghodrat Hamze Nava pp.2323-2331

Accurate calculation of the pressure and temperature of water, steam, and ice :formulation for CFD Jang-Chang Lee ;Meng-Sing Liou pp.2333-2340

Potential assessment of an innovative hybrid ventilator for building ventilation Tzyy-hwang Shieh ;Pei-Chi Chang ;Che-ming Chiang ;Chi-ming Lai pp.2341-2345

Heat transfer performance of condenser tubes in an MSF desalination system T. Galal ; A. Kalendar ; A. Al-Saftawi ; M. Zedan pp.2347-2355

참고문헌 (10건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 J. Söderkvist, Micromachined Gyroscopes, Sensors and Actuators, A 43 (1994) 65-71. 미소장
2 K. Maenaka, T. Fujita, Y. Konishi and M. Maeda, Analysis of a highly sensitive silicon gyroscope, Sensors and Actuators,A 54 (1996) 568-573. 미소장
3 W. Geiber, B. Folkmer, U. Sobe, H. Sandmaier and W. Lang, New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes, Sensors and Actuators, A 66 (1998) 118-124. 미소장
4 S. Emre and T. Akin, A symmetric surface micromachined gyroscope with decoupled oscillation modes, Sensors and Actuators, A 97 (2002) 347-358. 미소장
5 Vibration Analysis for a Coupled MEMS-Gyroscope Design 소장
6 R. S. Hartenberg and J. Denavit, Kinematic Synthesis of Linkages, McGraw-Hill, New York, USA (1964). 미소장
7 Effect of Tolerance and Clearance in Linkage Design 네이버 미소장
8 The Determination of the Probabilistic Properties of Velocities and Accelerations in Kinematic Chains With Uncertainty 네이버 미소장
9 Design variable tolerance effects on the natural frequency variance of constrained multi-body systems in dynamic equilibrium 네이버 미소장
10 Y. W. Kim and H. H. Yoo, Statistical estimation of modal characteristics of a structural system based on design variable samples, The Korean Society of Mechanical Engineers Transaction, A 33 (11) (2009) 1314-1319. 미소장

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