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The surface passivation of crystalline silicon solar cells using plasma enhanced chemical vapor deposition (PECVD), hydrogenated, silicon-nitride (SiNx:H) thin films has become significant due to a low-temperature, low-cost and very effective defect passivation process. Also, a good quality antireflection coating can be formed. In this work, SiNx:H thin films were deposited by varying the gas ratio R (=NH3/SiH4+NH3) and were annealed by rapid thermal processing (RTP). Metal-insulator-semiconductor (MIS) devices were fabricated using SiNx:H thin films as insulator layers and they were analyzed in the temperature range of 100–400 K by using capacitance-voltage (C-V) and current-voltage (I–V) measurements. The annealed SiNx:H thin films were evaluated by using the electrical properties at different temperature to determine the effect of surface passivation. We achieved an energy conversion efficiency of 18.1% under one-sun standard testing conditions for large-area (156 mm × 156 mm) crystalline-silicon solar cells.

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기사명 저자명 페이지 원문 목차
Multi-user quantum network system and quantum communication using χ-type entangled states Chang Ho Hong, Jin O. Heo, Jong In Lim, Hyung Jin Yang pp.1-5

Larger curvature model on a Sierpinski gasket substrate Jin Min Kim, Dae Ho Kim, Wone Keun Han, Daeseung Kang pp.6-9

Amorphous-to-crystalline phase transformation in (GeTe)ₓ (Sb₂Te₃) (x = 0.5, 1, 2, 8) thin films Ki-Ho Song, Seung-Cheol Baek, Hyun-Yong Lee pp.10-16

Optoelectronic oscillator stabilized to an intra-loop atomic filter with a coherent population trapping resonance Sin Hyuk Yim, D. Cho pp.17-21

Time-dependent effect on electron beam irradiation of Cu-In-Se precursors by using the DC co-sputtering method Chaehwan Jeong, Jin Hyeok Kim pp.22-26

Nuclear structure of ^14^Be nucleus Waleed S. Hwash, Redzuwan Yahaya, Shahidan Radiman, Aznan Fazli Ismail pp.27-32

Three-nucleon forces from different meson exchanges Ahmed Osman pp.33-37

Design of an in-flight radioactive isotope beam separator for the enhancement of purity by using an energy degrader and a RF kicker Jang Youl Kim, Chong Cheoul Yun, Chun Sik Lee pp.38-44

Nonlinear interaction between radiation and an electron beam in a free-electron laser oscillator based on a two-frequency wiggler Soon-Kwon Nam, Ki-Bum Kim pp.45-48

Acomprehensive study of H emission in a TEA CO₂laser-induced helium gas plasma for highly sensitive analysis of hydrogen in metal samples Zener Sukra Lie, Ali Khumaeni, Hideaki Niki, Kazuyoshi Kurihara, Koo Hendrik Kurniawan, Rinda Hedwig, Ken-ichi Fukumoto, Kiichiro Kagawa, Yong Inn Lee pp.49-54

Interaction between external and intrinsic torque and its impact on internal transport barrier formation : a gyrofluid simulation study Hogun Jhang, S.S. Kim, P.H. Diamond pp.55-61

Electron collision cross sections for the TMS molecule and electron transport coefficients in TMS-Ar and TMS-O₂mixtures Pham Xuan Hien, Do Anh Tuan, Byung-Hoon Jeon pp.62-72

Ti-dopant-enhanced photocatalytic activity of a CaFe₂O₄/MgFe₂O₄ bulk heterojunction under visible-light irradiation Pramod H. Borse, Jae Young Kim, Jae Sung Lee, Kwon Taek Lim, Euh Duck Jeong, Jong Seong Bae, Jang-Hee Yoon, Seong Mi Yu, Hyun Gyu Kim pp.73-79

Local structure of lead-containing mixed-ion perovskite ferroelectrics studied using neutron total scattering analysis I.-K. Jeong, Dhananjai Pandey pp.80-84

First-principles studies of AlSb, GaSb, and InSb on Si(111) and Si(100) Oleg Efimov, Geunjung Lee, Young-Gui Yoon pp.85-88

Electrical characterization of MIS devices using PECVD SiNₓ :H films for application of silicon solar cells Jin-Su Yoo, Jun-Sik Cho, Joo-Hyung Park, Seung-Kyu Ahn, Kee-Shik Shin, Kyung-Hoon Yoon, Junsin Yi pp.89-92

Theeffect of an applied magnetic field on the (111) texture of a NiFe layer for perpendicular magnetic recording media Jin-Soo Kim, Seong-Hun Na, Seung-kyu Lim, Su-Jeong Suh pp.93-96

Temperature dependence of the dielectric function and critical-point energies of InAs Tae Jung Kim, Soon Yong Hwang, Jun Seok Byun, Nilesh S. Barange, Jun Young Kim, Young Dong Kim pp.97-101

Fabrication and photoluminescence studies of porous ZnO nanorods Min Young Cho, Min Su Kim, Soaram Kim, Jae-Young Leem, Do Yeob Kim, Sung-O. Kim, Giwoong Nam pp.102-107

Fabrication and electrical characteristics of graphene-based charge-trap memory devices Sejoon Lee, Sung Min Kim, Emil B. Song, Kang L. Wang, David H. Seo, Sunae Seo pp.108-112

Fluorinated copper-phthalocyanine-based n-type organic field-effect transistors with a polycarbonate gate insulator Kunjithapatham Sethuraman, Palanisamy Kumar, Kannappan Santhakumar, Shizuyasu Ochiai, Paik-Kyun Shin pp.113-118

Versatile resistive switching(memristive) behavior in an ITO/ZRO₂/AG sandwich fabricated using electrohydrodynamic printing Kyung Hyun Choi, Muhammad Naeem Awais pp.119-123

Optimal area and intrinsic coherent resonance of neurons due to ion channel noise under an external stimulus Zhengzhen Zhang, Shaowen Zeng, Wenyan Tang, Jinlin Hu, Rongfeng Wang, Liming Zhou, Shangyou Zeng pp.124-129

Design of a high-resolution small-animal SPECT-CT system sharing a CdTe semiconductor detector Hyun-Ju Ryu, Young-Jin Lee, Seung-Wan Lee, Hyo-Min Cho, Yu-Na Choi, Hee-Joung Kim pp.130-134

Effects of processing steps with an edge image on determining the presampled modulation transfer function Ye-seul Kim, Hye-Suk Park, Hee-Joung Kim pp.135-140

Astudy evaluating the dependence of the patient dose on the CT dose change in a SPECT/CT scan Woo-Hyun Kim, Ho-Sung Kim, Kyung-Rae Dong, Woon-Kwan Chung, Jae-Hwan Cho, Jae-Woo Shin pp.141-146

Role of preferential words in language formation Juan Li, Zhaojin Xu, Zhongwei Wu, Lianzhong Zhang pp.147-151

Spectral analysis on earth's spin rotation for the recent 30 years Sung-Ho Na, Jung-Ho Cho, Jeongho Baek, Younghee Kwak, Sung-Moon Yoo pp.152-157

Measurement of hydrogen permeation through SUS 316L for pressures from 0.8 to 2.0 bar and thicknesses from 1 to 3 mm at 800℃ S.K. Lee, S.J. Noh, S.R. In pp.158-161

Heat capacity in a quantum-dot superlattice with the Zeeman effect Sang Chil Lee, Suck Whan Kim pp.162-167

Erratum : Structural Analysis of ZnO Nanowires Synthesized by Using a Low-temperature Hydro-thermal Method 이상효, 이준석, WonBae Ko, 강태성, 홍진표, SeungNam Cha pp.169-169

Erratum : Hydrogen Permeability, Diffusivity, and Solubility of SUS 316L Stainless Steel in the Temperature Range 400 to 800 ℃ for Fusion Reactor Applications 이석관, H. S. Kim, 노승정, J. H. Han pp.168-168

참고문헌 (13건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 J. C. Barbour, H. J. Stein, O. A. Popov, M. Yoder and C. A. Outten, J. Vac. Sci. Technol., A 9, 480 (1991). 미소장
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6 H. Schlemm, A. Mai, S. Roth, D. Roth, K. M. Baumgartner and H. Muegge, Surf. Coat. Technol. 174, 208 (2003). 미소장
7 T. Takagi, K. Takeche, Y. Nakagawa, Y. Watabe and S. Nishida, Vacuum 51, 751 (1998). 미소장
8 S. A. Awan and R. D. Gould, Thin Solid Films 423, 267(2003). 미소장
9 W. Soppe, H. Rieffe and A. Weeber, Prog. Photovoltaics 13, 551 (2005). 미소장
10 V. Verlaan, C. H. M. van der Werf, Z. S. Flouweling, G. Romijn, A. W. Weeber, H. F. W. Dekkers, H. D. Goldbach and R. E. I. Schrop, Prog. Photovoltaics 15, 563 (2007). 미소장
11 W. A. P. Claassen, W. G. J. N. Valkenburg, M. F. C. Willemsen and W. M. V. D. Wijgert, J. Electrochem. Soc. 132, 893 (1985). 미소장
12 J. S. Yoo, J. H. So, G. J. Yu and J. Yi, Sol. Energy Mater. Sol. Cells 95, 7 (2011). 미소장
13 L. Cai, A. Rohatgi, D. Yang and M. A. El-Sayed, J. Appl. Phys. 80, 5385 (1996). 미소장

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