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Ruthenium-based ternary-oxide thin films were grown by using thermal atomic layer deposition. The films were grown by repeating super-cycles consisting of Ru and Al2O3 sub-cycles. X-ray diffraction showed that the structure of Ru ternary oxide thin film formed nano crystalline structure. The chemical state in oxide thin film was clearly investigated by X-ray photoelectron spectroscopy. The composition of Ru based ternary oxide film was characterized by secondary ion mass spectrometry. Quantitative analysis of thin oxide film using SIMS was calibrated by Rutherford backscattering spectrometry. Based on the results, effects on the Aluminum and oxygen incorporation into Ru were discussed.

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기사명 저자명 페이지 원문 목차
Synthesis, structure, and luminescence properties of In₂Ge₂O₇/SnO₂core-shell nanowires Sunghoon Park, Soyeon An, Changhyun Jin, Chongmu Lee pp.843-846

Preparation and characterization of MgO nanorods sheathed with ZnS Changhyun Jin, Sunghoon Park, Hyunsu Kim, Chongmu Lee pp.847-851

Theeffect of UV treatment on the recovery characteristics of a-IGZO-based thin film transistors Kyeong Min Yu, So Hyun Jeong, Byung Seong Bae, Eui-Jung Yun pp.852-857

Characterization and optical properties of Y₂SiO₅:Eu^3+^ phosphors prepared by using the reverse micelle and the sol-gel processes Myoung Gyu Ha, Kyoung-Rim Han, Jae-Sun Jeong, Jong Seong Bae, Euh Duck Jeong, K.S. Hong, Byung Seo Bae, Dong Sik Bae, Ho-Soon Yang pp.858-861

Acoustic anisotropy in 5CB liquid crystal cells as determined by using Brillouin light scattering Jae Hyun Kim, Tae Hyun Kim, Jae-Hyeon Ko, Jong-Hyun Kim pp.862-866

Properties of IGZO thin films irradiated by electron beams with various energies So Hyun Jeong, Byung Seong Bae, Kyeong Min Yu, Min Ki Ryu, Kyoung Ik Cho, Eui-Jung Yun pp.867-872

Cytotoxicity evaluations of pristine graphene and carbon nanotubes in fibroblastic cells Jong Ho Lee, Yong Cheol Shin, Oh Seong Jin, Eun Ji Lee, Dong-Wook Han, Seok Hee Kang, Suck Won Hong, Ji Young Ahn, Soo Hyung Kim pp.873-877

Piezoelectric and electromechanical properties with textured NKLNT lead-free piezoelectric ceramics Min-Soo Kim, Sung-Chan Lee, Sin-Woong Kim, Soon-Jong Jeong, In-Sung Kim, Jae-Sung Song pp.878-881

Fabrication and analysis of butterfly-type piezoelectric actuators Won-Hee Lee, Seok-Jin Yoon, Chong-Yun Kang, Hyeong-Yup Lee, Yun-Soo Lim, Byeong-Kwon Ju, Dae-Yong Jeong pp.882-886

Driving characteristics of a thin square frame-type ultrasonic motor Choong-Hyo Park, Seong-Su Jeong, Tae-Gone Park pp.887-890

Phase structure and piezoelectric properties of Li-modified NKLN lead-free piezoelectric ceramics Sin-Woong Kim, Sung-Chan Lee, Min-Soo Kim, Soon-Jong Jeong, In-Sung Kim, Jae-Sung Song pp.891-894

Enhancement in the microstructure and the strain properties of Bi_1/2_(Na,K)_1/2_TiO₃-based lead-free ceramics by Li substitution Van-Quyet Nguyen, Chang-Hyo Hong, Hyun-Young Lee, Young Min Kong, Jae-Shin Lee, Kyoung-Kwan Ahn pp.895-898

Low-temperature sintering of lead-free Bi_1/2_(Na,K)_1/2_TiO₃-based electrostrictive ceramics with CuO addition Jin-Kyu Kang, Dae-Jun Heo, Van Quyet Nguyen, Hyoung-Su Han, Jae-Shin Lee, Kyoung-Kwan Ahn pp.899-902

Electrical properties of Dy, Mn Co-doped BiFeO₃thin films prepared by using chemical solution deposition J.W. Kim, C.M. Raghavan, H.J. Kim, Y.J. Kim, K.W. Jang, S.S. Kim, Y.I. Lee, J.M. Lim, D.S. Shin pp.903-907

Bandwidth-broadening properties by using a variable width structure in a cantilever-type piezoelectric energy scavenger S.E. Moon, W.S. Yang, J. Kim, Y.T. Kim pp.908-912

Electric-field-enhanced ionic diffusivity in electrolytes : a model study Doo Seok Jeong, Inho Kim, Taek Seong Lee, Wook Seong Lee, Kyeong-Seok Lee, Doh-Kwon Lee pp.913-919

Effect of oxygen pressure on electrical properties of Ge-doped ZnO thin films grown by using pulsed laser deposition D.J. Kim, M.H. Lee, J.S. Park, D. Do, W. Lee, M.H. Kim, T.K. Song, H.I. Choi, K.W. Jang, W.J. Kim pp.920-923

Fabrication and surface characterization of a TiO₂nanotube surface by using electrochemical oxidation Eun Hyuk Chung, Seong Mi Yu, Seong Rim Baek, Eun-Kyung Jang, Hyun Ju Han, Jong Pil Kim, Tae Eun Hong, Jong-Seong Bae, Jong Sung Jin, Euh Duck Jeong pp.924-927

Theeffect of annealing temperature on the piezoelectric and dielectric properties of lead-free Bi_0.5_(Na_0.85_K_0.15_)_0.5_TiO₃thin films Sung Sik Won, Chang Won Ahn, Ill Won Kim pp.928-932

Shallow n-type doping by transition-metal impurities (Hf, Zr, or Ti) in amorphous In₂O₃ Doukyun Kim, Maengsuk Kim, Chul Hong Park pp.933-937

Asolid electrolyte potentiometric CO₂gas sensor composed of lithium phosphate as both the reference and the solid electrolyte materials Hyung-Kun Lee, Nak-Jin Choi, Seung Eon Moon, Woo Seok Yang, Jongdae Kim pp.938-941

Influence of calcination temperature on piezoelectric properties of 0.95(K_0.52_Na_0.48_)NbO₃-0.05LiTaO₃lead-free piezoelectric ceramics Dong-Jin Shin, Jung-Hyuk Koh pp.942-946

Effect of sintering temperature on the piezoelectric properties in BiFeO₃-BaTiO₃ceramics Y.J. Lee, J.S. Kim, S.H. Han, H.-W. Kang, H.-G. Lee, Chae Il Cheon pp.947-950

Dielectric and conduction behaviors of lead-free LiNbO₃-modified Bi_0.5_Na_0.5_TiO₃ceramics Jin Soo Kim, Ali Hussain, Myong-Ho Kim, Tae Kwon Song, Su Tae Chung, Chang Hee Chung, Ho Sueb Lee pp.951-955

Crystal structure and piezoelectric properties of KNbO₃-BiFeO₃ceramics Jin Hong Choi, Jeong Seog Kim, Seok Bum Hong, Ki Woong Chae, Chae Il Cheon pp.956-960

Dielectric, ferroelectric and piezoelectric properties of CdO-substituted lead-free (Na_0.5_K_0.5_)NbO₃ceramics Su Tae Chung, Sang-Bock Cho, Jin Soo Kim pp.961-965

Ferroelectric and piezoelectric properties of lead-free (K,Na,Li)(Nb,Ta,Sb)O₃ceramics fabricated by using a citric-acid-assisted modified sol-gel method Ju Sung Kim, Jong Pil Kim, Chang Won Ahn, Ill Won Kim, Byung Moon Jin pp.966-970

Microwave dielectric ceramics with rare-earth elements. 1 Hitoshi Ohsato, Isao Kagomiya, Ki-Woong Chae pp.971-979

Synthesis and characterization of nanocrystalline yttria-stabilized zirconia for an electrolyte in a solid-oxide fuel cell S.H. Kim, G.Y. Jin, M. Kim, Y.S. Yang pp.980-983

Characterization of a Ru-based ternary-oxide thin film for a diffusion barrier Tae Eun Hong, E.D. Jeong, M.R. Byeon, Y.B. Kang, Ho-Soon Yang, Soo-Hyun Kim pp.984-987

Synthesis and conductivity of the lithium-rich borosilicate glass system Young-Hoon Rim, Mac Kim, Yong Suk Yan pp.988-991

참고문헌 (19건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 S. M. Rossnagel and T. S. Kuan, J. Vac. Sci. Technol., B 22, 240 (2004). 미소장
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5 O. Chyan, T. N. Arunagiri and T. Ponnuswamy, J. Electrochem. Soc. 150, C347 (2003). 미소장
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7 S. Kumar, D. Greenslit, T. Chakraborty and E. T. Eisenbraun, J. Vac. Sci. Technol., A 27, 572 (2009). 미소장
8 D. Greenslit, S. Kumar, T. Chakraborty and E. T. Eisenbraun, ECS Trans. 13, 63 (2008). 미소장
9 A. E. Kaloyeros and E. Eisenbraun, Annu. Rev. Mater. Sci. 30, 363 (2000). 미소장
10 O. Renault, L. G. Gosset, D. Rouchon and A. Ermolieff, J. Vac. Sci. Techno., A 20, 1867 (2002). 미소장
11 W. Hansch, A. Nakajima and S. Yokoyama, Appl. Phys. Lett. 75, 1535 (1999). 미소장
12 K. Wittmaack and J. B. Clegg, Appl. Phys. Lett. 37,285 (1980). 미소장
13 P. J. Roksnoer, J. W. F. M. Maes, A. T. Vink, C. J. Vriezema and P. C. Zalm, Appl. Phys. Lett. 59, 3297 (1991). 미소장
14 R. G. Wilson, F. A. Stevie and C. W. Magee, Secondary Ion Mass Spectrometry (John Wiley and Sons, New York, 1989). 미소장
15 http://srdata.nist.gov/xps, last accessed Mar 10, 2012. 미소장
16 C. P. Hobbs, J. W. McMillan and D. W. Palmer, Nucl. Instrum. Methods Phys. Res., Sect. B 30, 342 (1988). 미소장
17 H. A. Storms, K. F. Brown and J. D. Stein, Anal. Chem.49, 2023 (1977). 미소장
18 Y. Gao, J. Appl. Phys. 64, 3760 (1988). 미소장
19 P. W. Palmberg, Anal. Chem. 45, 549A (1973). 미소장

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