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목차 1
칩 간 공간적 유사성과 검사항목의 상관관계를 고려한 반도체 웨이퍼 테스트 데이터의 결측치 대체 방법 개발 = Development of a missing value imputation method for semiconductor wafer test data considering spatial similarity among chips and correlation between test items / 김주영 ; 배영목 ; 최승현 ; 김광재 1
[요약] 1
1. 서론 1
2. 문헌 리뷰 2
3. 제안 방법론 3
3.1. GAIN 3
3.2. 제안 방법 4
4. 실험 5
4.1. 실험 환경 설정 5
4.2. 제안 방법의 성능 평가 5
4.3. 제안 방법의 활용 및 활용 결과 6
5. 토의 6
6. 결론 7
참고문헌 7
저자소개 8
번호 | 참고문헌 | 국회도서관 소장유무 |
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1 | Adeli, E., Zhang, J., and Taflanidis, A. A. (2021), Convolutional generative adversarial imputation networks for spatio-temporal missing data in storm surge simulations, arXiv preprint. | 미소장 |
2 | Aittokallio, T. (2010), Dealing with missing values in large-scale studies: microarray data imputation and beyond, Briefings in Bioinformatics, 11(2), 253-264. | 미소장 |
3 | Baek, S. and Lee, M. (2022), A Study on the Type Classification Model of Defective Semiconductor WafersUsing Deep Learning, Journal of the Korean Institute of Commucations and Information Sciences, 1158-1159. | 미소장 |
4 | Burkhardt, A., Berryman, S., Brio, A., Ferkau, S., Hubner, G., Lynch, K., ..., and Sonderer, K. (2018), Measuring Manufacturing Test Data Analysis Quality, In 2018 IEEE Autotestcon, 1-6. | 미소장 |
5 | Chandar, S., Khapra, M. M., Larochelle, H., and Ravindran, B. (2016), Correlational neural networks, Neural Computation, 28(2), 257-285. | 미소장 |
6 | Han, Y. and Lee, C. (2005), Automatic Classification of Failure Patterns in Semiconductor EDS Test for Yield Improvement, Journal of the Korea Society for Simulation, 14(1), 1-8. | 미소장 |
7 | Hsu, C. K., Lin, F., Cheng, K. T., Zhang, W., Li, X., Carulli, J. M., and Butler, K. M. (2013), Test Data Analytics - Exploring Spatial and test-item Correlations in Production Test Data, Proceedings -International Test Conference, ITC, 1-4. | 미소장 |
8 | Huang, K., Carulli, J. M., and Makris, Y. (2013), Counterfeit electronics: A rising 43 threat in the semiconductor manufacturing industry, Proceedings - International Test Conference, ITC, 1-4. | 미소장 |
9 | Jung, J. and Jung, Y. (2022), Wafer bin map failure pattern recognition using hierarchical clustering, Journal of Korean International Statistical Society, 35(3), 407-419. | 미소장 |
10 | Kang, H. and Baek, J. (2020), Improved Quality Prediction Method by Clustering Data in Semiconductor Manufacturing Process, Journal of the Korean Institute of Industrial Engineers, 46(2), 134-142. | 미소장 |
11 | Kim, D., Park, Y. S., Kim, H. W., Park, K. S., and Moon, I. K. (2022), Inventory policy for postponement strategy in the semiconductor industry with a die bank, Simulation Modelling Practice and Theory, 117, 102498. | 미소장 |
12 | Kim, S. and Kim, J. (2022), A study on the development strategy of the Metrology industry using the modified AHP and IPA, Journal of the Korean Institute of Plant Engineering, 27(2), 49-59. | 미소장 |
13 | Ko, G., Tak, H., and Lee, B. (2014), Impact of Missing Values on Survey Research and Relevancy of Multiple Imputation Techniques, Journal of the Korean Journal of Policy Analysis and Evaluation, 24(3), 49-75. | 미소장 |
14 | Lee, Y. H., Ham, M., Yoo, B., & Lee, J. S. (2009), Daily planning and scheduling system for the EDS process in a semiconductor manufacturing facility, The International Journal of Advanced Manufacturing Technology, 41(5), 568-579. | 미소장 |
15 | Lee, S. Y., Connerton, T. P., Lee, Y. -W., Kim, D., Kim, D., and Kim, J. -H. (2022), Semi-GAN: An Improved GAN-Based Missing Data Imputation Method for the Semiconductor Industry, IEEE Access, 10, 72328-7233. | 미소장 |
16 | Lee, Y. H., Ham, M., Yoo, B., and Lee, J. S. (2009), Daily planning and scheduling system for the EDS process in a semiconductor manufacturing facility, The International Journal of Advanced Manufacturing Technology, 41(5), 568-579. | 미소장 |
17 | Luo, M., Wang, S., Wang, C., Chen, W., Zhu, E., and Liu, X. (2022), DICDP: Deep Incomplete Clustering with Distribution Preserving, In International Conference on Artificial Intelligence and Security Springer, Cham, 162-175. | 미소장 |
18 | Nuhu, A. A., Zeeshan, Q., Safaei, B., and Shahzad, M. A. (2022), Machine learning-based techniques for fault diagnosis in the semiconductor manufacturing process: A comparative study, The Journal of Supercomputing, 1-51. | 미소장 |
19 | Park, J. and Kim, S. (2014), A Prediction Methodology of Package Chip Quality using Probe TestFail bit Count Data, Journal of the Korean Institute of Industrial Engineers, 528-536. | 미소장 |
20 | Schrunner, S. (2019), Pattern Recognition in Analog Wafer Test Data:A Health Factor for Process Patterns. Ph.D.diss, Graz University of Technology, Austria. | 미소장 |
21 | Tsung, C. K., Hsieh, H. Y., and Yang, C. T. (2019), An implementation of scalable high throughput data platform for logging semiconductor testing results, IEEE Access, 7, 26497-26506. | 미소장 |
22 | Van Buuren, S. and Groothuis-Oudshoorn, K. (2011), Mice:Multivariate imputation by chained equations in R, Journal of Statistical Software, 45, 1-67. | 미소장 |
23 | Wang, Y., Li, D., Li, X., and Yang, M. (2020), PC-GAIN: Pseudo-label Conditional Generative Adversarial Imputation Networks for Incomplete Data, Neural Networks, 141, 395-403. | 미소장 |
24 | Yeon, W. (2021), Conflict between the US and China and China's strategy and prospects for fostering the semiconductor industry, KIEP World Economy Focus, 39(4), 1-19. | 미소장 |
25 | Yoon, J., Jordon, J., and van der Schaar, M. (2018), GAIN: Missing Data Imputation using Generative Adversarial Nets, International Conference on Machine Learning, 5689-5698. | 미소장 |
26 | Zhang, Y. and Thorburn, P. J. (2022), Handling missing data in near real-time environmental monitoring: A system and a review of selected methods, Future Generation Computer Systems, 128, 63-72. | 미소장 |
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