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Contents
Chapter 1. Introduction 7
Chapter 2. Ellipsometer System 10
2.1. Fresnel Coefficients for a Non-Magnetic Medium 11
2.1.1. Two Media with a Single Boundary 11
2.1.2. Multilayer System 13
2.1.3. Modelling Process 14
2.2. Principles of a Phase Modulation Ellipsometric Spectrometer 16
2.2.1. Principles of the Ellipsometry 16
2.2.2. Principles of an Spectroscopic Ellipsometry System Using PEM 17
2.3. Details of a Magneto-Optical Ellipsometric Spectrometer System 21
2.3.1. Key Points of a Magneto-Optical Ellipsometric Spectrometer System 21
2.3.2. Determination of the Incidence Angle. 23
2.3.3. Ellipsoidal Mirrors 23
2.3.4. Electromagnet 25
2.3.5. Common Parts with MO Kerr Spectrometer System 26
2.4. Experimental Results 30
2.4.1. Calibration 30
2.4.2. Errors in Ellipsometric Measurement and Solutions 33
2.4.3. Measurement of Si Wafer 35
2.5. Temperature Stage 39
2.5.1. Basic Parts of a Temperature Stage 39
2.5.2. Assistant Control Parts 43
2.5.3. Results 43
Chapter 3. Effective Medium Theory 48
3.1. Effective Medium Theory for a Non-Magnetic Material 49
3.2. Modified Effective Medium Theory 50
3.3. Experimental Results and Discussions of the Modified Effective Medium Theory 57
3.3.1. Effects of Ar Sputtering Gas Pressure 57
3.3.2. Comparison with Published Data 60
3.3.3. Conclusions 66
Chapter 4. Fresnel Reflection Coefficients for Magnetic Medium 68
4.1. Magneto-Optical Effects for Normal Incidence 69
4.2. Magneto-Optical Effects for Oblique Incidence 71
4.3. Vectorial Determination of the Direction of Magnetization 75
4.4. Very Thin Film Case 77
4.5. Principles of Experimental Method 78
Chapter 5. Conclusions 80
Appendix A. Programs for Effective Medium Theory 82
Appendix B. Publication Lists 103
B.1. Journal Publications(Publicatoins) 103
B.2. Conference Presentations 104
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