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This paper presents design and fabrication of optimized geometry structure of electrostatic inkjet

head. In order to verify effect of geometry shape, we simulate electric field intensity according to the head structure. The electric field strength increases linearly with increasing height of the micro nozzle. As the nozzle diameter decreases, the electric field along the periphery of the meniscus can be more concentrated. We design and fabricate the electrostatic inkjet heads, hole type and pole type, with optimized structure. It was fabricated using thick-thermal oxidation and silicon micromachining technique such as the deep reactive ion etching (DRIE) and chemical wet etching process. It is verified experimentally that the use of the MEMS inkjet head allows a stable and sustainable microdripping mode of droplet ejection. A stable micro dripping mode of ejection is observed under the voltages 2.5 kV and droplet diameter is 10 μm. Index Terms?MEMS technology, silicon deep

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권호기사 목록 테이블로 기사명, 저자명, 페이지, 원문, 기사목차 순으로 되어있습니다.
기사명 저자명 페이지 원문 목차
The effects of nanocrystalline silicon thin film thickness on top gate nanocrystalline silicon thin film transistor fabricated at 180℃ Dong-Won Kang ;Joong-Hyun Park ;Sang-Myeon Han ;Min-Koo Han pp.111-114

Extraction of effective carrier velocity and observation of velocity overshoot in sub-40 nm MOSFETs Junsoo Kim ;Jaehong Lee ;Yeonam Yun ;Byung-Gook Park ;Jong Duk Lee ;Hyungcheol Shin pp.115-120

Design and fabrication of electrostatic inkjet head using silicon micromachining technology Youngmin Kim ;Sanguk Son ;Jaeyong Choi ;Doyoung Byun ;Sukhan Lee pp.121-127

Core circuit technologies for PN-diode-cell PRAM Hee-Bok Kang ;Suk-Kyoung Hong ;Sung-Joo Hong ;Man Young Sung ;Bok-Gil Choi ;Jinyong Chung pp.128-133

Power-gating structure with virtual power-rail monitoring mechanism Hyoung-Wook Lee ;Hyunjoong Lee ;Jong-Kwan Woo ;Woo-Yeol Shin ;Suhwan Kim pp.134-138

X band 7.5W MMIC power amplifier for radar application Kyung Ai Lee ;Jong-hoon Chun ;Songcheol Hong pp.139-142

Design of a 2.4-GHz fully differential zero-IF CMOS receiver employing a novel hybrid balun for wireless sensor network Shinil Chang ;Jubong Park ;Kwang-Ho Won ;Hyunchol Shin pp.143-149

BER simulator development for link compliance analysis Hyun Chul Kang ;Woo-Seop Kim ;Jae-Wook Lee ;Young-Chan Jang ;Kwan-Wook Park ;Jonghoon Kim ;Jung-Bae pp.150-155

Design consideration of bulk FinFETs with locally-separated-channel structures for sub-50 nm DRAM cell transistors Han-A-Reum Jung ;Ki-Heung Park ;Jong-Ho Lee pp.156-163

Study of the effects of the antisite related defects in silicon dioxide of metal-oxide-semiconductor structure on the gate leakage current Ling-Feng Mao ;Zi-Ou Wang ;Ming-Zhen Xu ;Chang-Hua Tan pp.164-169

Optimizing effective channel length to minimize short channel effects in sub-50 nm single/double gate SOI MOSFETs Sudhansh Sharma ;Pawan Kumar pp.170-177

참고문헌 (11건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 Electrostatic Inkjet Patterning Using Si Needle Prepared by Anodization 네이버 미소장
2 S. Lee, D. Byun, S. J. Han, S. U. Son, Y. J. Kim, H. S. Ko, “Electrostatic Droplet Formation and Ejection of Colloid,” MHS, July 31, 2004. 미소장
3 S.U.Son, Y.M.Kim, J.Y.Choi, S.H.Lee, H.S.Ko, and D.Y.Byun, “Fabrication of MEMS Inkjet Head for Drop-on-Demand Ejection of Electrostatic Force Method,” Trans. KIEE. Vol.56. August, 2007. 미소장
4 C.M. Ho, “Fluidics-the link between micro and nano sciences and technologies,” IEEE Int. Conf. MEMS, pp.375-384, 2001. 미소장
5 E. Lee, CRC Press, Microdrop Generation, 2003. 미소장
6 G. Taylor : Proc. Roy. Soc. Lond. A, 313, 1969. 미소장
7 A. Sou, K. Sasai, and T. Nakajima, “Control of Ink Transportation in Electrostatic Inkjet Printer,” ASME Fluid Engineering Division Summer Meeting, July 2002. 미소장
8 Y. J. Kim, H. S. Ko, S. H. Lee, S. U. Son, D. W. Jung and D. Y. Byun, “Electrostatic droplet ejector with monolithic fabrication of nozzle,” Journal of the Korean Physical Society, Vol.51, pp.S42~S46, 2007. 미소장
9 S. H. Lee, D. Y. Byun, D. W. Jung, J. Y. Choi, Y. J. Kim, J. H. Yang, S. J. Han, S. U. Son, S. B. Quang Tran and H. S. Ko, “Pole-type ground electrode in nozzle for electrostatic field induced drop-ondemand inkjet head” Sensors & Actuators, Vol. 141, No. 2, pp.506-514, 2008. 미소장
10 Fundamental Investigation on Electrostatic Ink Jet Phenomena in Pin-to-Plate Discharge System 네이버 미소장
11 Properties of Ink-Droplet Formation in Double-Gate Electrospray 네이버 미소장

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