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A new high speed AFM probe has been proposed and fabricated. The probe is integrated

with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an

etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process.

Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast

imaging. The resonant frequency of the fabricated probe is 92.9 kHz and the maximum deflection is

5.3 μm at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM

system at the scan speed of 600μm/sec

권호기사

권호기사 목록 테이블로 기사명, 저자명, 페이지, 원문, 기사목차 순으로 되어있습니다.
기사명 저자명 페이지 원문 목차
(A)robust fault location algorithm for single line-to-ground fault in double-circuit transmission systems Wen-Hao Zhang ,Umar Rosadi ,Myeon-Song Choi ,Seung-Jae Lee ,Ilhyung Lim pp.1-7

(A)study on reliability differentiated pricing of long-term transactions Balho H. Kim pp.8-13

Available transfer capability enhancement with FACTS devices in the deregulated electricity market B.V. Manikandan, S. Charles Raja, P. Venkatesh pp.14-24

Generalized reliability centered maintenance modeling through modified semi-markov chain in power system Geun-Pyo Park ,Jae-Haeng Heo ,Sang-Seung Lee ,Yong Tae Yoon pp.25-31

Fuzzy PSO congestion management using sensitivity-based optimal active power rescheduling of generators Ch Venkaiah ,D M Vinod Kumar pp.32-41

Introduction of generator unit controller and its tuning for automatic generation control in Korean energy management system(K-EMS) Min-Su Park ,Yeong-Han Chun pp.42-47

Determination of regulator parameters and transient analysis of modified self-commutating CSI-fed IM drive A. K. Pandey ,S. M. Tripathi pp.48-58

Backstepping control for multi-machine web winding system Bousmaha Bouchiba ,Abdeldjebar Hazzab ,Hachemi Glaoui ,Fellah Med-Karim ,Ismaïl Khalil Bousserhane ,Pierre Sicard pp.59-66

Application of a robust fuzzy sliding mode controller synthesis on a buck-boost DC-DC converter power supply for an electric vehicle propulsion system Boumediène Allaoua ,Abdellah Laoufi pp.67-75

(A)magnetostrictive force and vibration mode analysis of 3 kW BLDC motor by a magneto-mechanical coupling formulation Pan Seok Shin ,Hee Jun Cheung pp.76-80

Thrust performance improvement of a linear induction motor Hyung-Woo Lee ,Chan-Bae Park ,Byung-Song Lee pp.81-85

AC-PDP sustain driver using bidirectional switches Feel-soon Kang pp.86-93

Design and analysis of hybrid stator bearingless SRM Dong-Hee Lee ,Jin-Woo Ahn pp.94-103

Sliding mode current controller design for power LEDs Eung-Seok Kim ,Cherl-Jin Kim pp.104-110

Implementation of an inductively coupled EM probe system for PD diagnosis Hee-Dong Kim ,Noh-Joon Park ,Dae-Hee Park pp.111-118

(A)high-speed single crystal silicon AFM probe integrated with PZT actuator for high-speed imaging applications Il-Joo Cho ,Kwang Seok Yun ,Hyo-Jin Nam pp.119-122

Analysis of arc tube properties by degradation in ceramic metal halide lamp Jong-Kyung Yang ,Hyeok-Jin Jang ,Dae-Hee Park pp.123-127

Generation of non-uniform meshes for finite-difference time-domain simulations Hyeong-Seok Kim ,Insung Ihm ,Kyung Choi pp.128-132

Self-tuning fuzzy logic controller for a dual star induction machine Elkheir Merabet ,Hocine Amimeur ,Farid Hamoudi ,Rachid Abdessemed pp.133-138

(A)new modified CNP for autonomous microgrid operation based on multiagent system Hak-Man Kim ,Wenpeng Wei ,Tetsuo Kinoshita pp.139-146

참고문헌 (7건) : 자료제공( 네이버학술정보 )

참고문헌 목록에 대한 테이블로 번호, 참고문헌, 국회도서관 소장유무로 구성되어 있습니다.
번호 참고문헌 국회도서관 소장유무
1 Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage 네이버 미소장
2 Nanolithography on thin layers of PMMA using atomic force microscopy 네이버 미소장
3 Indentation and Adhesive Probing of a Cell Membrane with AFM: Theoretical Model and Experiments 네이버 미소장
4 D. Fotiadis, S. Scheuring, S. A. Muller, A. Engel and D. J. Muller, “Imaging and manipulation of biological structures with the AFM”, Micron, Vol. 33, issue 4, pp. 385-397, 2005. 미소장
5 PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM 네이버 미소장
6 High-speed tapping mode imaging with active Q control for atomic force microscopy 네이버 미소장
7 Atomic Force Microscope Probe Tips Using Heavily Boron-Doped Silicon Cantilevers Realized in a <110> Bulk Silicon Wafer. 네이버 미소장

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